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5 2010517

????????? "???????"??. ?????. 2010/05/17. 2. ??????. ??????. Si????????????????????????Vt?????!??????????????LOCOS~STI???????????Shallow Trench Isolation???????STI??????????????CMP. 2010/05/17. ????????? "???????"??. 3. Si??????????????????. 2010/05/17. ????????? "???????"??. 4. ????????????????????????MOS??????????????????????!.

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5 2010517

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    1. ????????? ”???????”?? ??????? (5) 2010?5?17? ?? ?? 2010/05/17 1

    2. ????????? ”???????”?? 2010/05/17 2

    3. ?????? Si?????????????????? ??????Vt?????!? ????????????? LOCOS~STI??????? ????Shallow Trench Isolation??????? STI??????? ??????? CMP 2010/05/17 ????????? ”???????”?? 3

    4. Si?????????????????? 2010/05/17 ????????? ”???????”?? 4 ????????????????????????MOS??????????????????????!

    5. ????????????? 2010/05/17 ????????? ”???????”?? 5

    6. ?????????? ???????? ???????? ???????????? ?????????????? ??????????! ??????????????DOF????????????? DOF:Depth of focus 2010/05/17 6 ????????? ”???????”??

    7. ?????????? LOCOS (Local oxidation isolation) SiN????????SiO2????????SiN??????????????? SiN?????????? ??:????????? “Bird’s beak” Shallow Trench Isolation ????????????? ??;?????????“????”???? 2010/05/17 7 ????????? ”???????”??

    8. LOCOS???? 2010/05/17 ????????? ”???????”?? 8

    9. LOCOS??(1) 2010/05/17 ????????? ”???????”?? 9

    10. LOCOS??(2) 2010/05/17 ????????? ”???????”?? 10

    11. LOCOS?? 2010/05/17 ????????? ”???????”?? 11

    12. STI???? 2010/05/17 ????????? ”???????”?? 12

    13. SiN???????SiO2?? 2010/05/17 ????????? ”???????”?? 13

    14. CMP??? 2010/05/17 ????????? ”???????”?? 14

    15. SiN??? 2010/05/17 ????????? ”???????”?? 15

    16. Si?????SiO2???????? 2010/05/17 ????????? ”???????”?? 16

    17. ??????? CMP??”Dishing” ? ????????????????? “?????”????????? ? SiN?????SiO2??????????????????? 2010/05/17 17 ????????? ”???????”??

    18. ????????? ”???????”?? 2010/05/17 18

    19. ??????????????????? ????????????? (??)?? p/n?? “???”(????)@?????????? ???????????(??!) 2010/05/17 19 ????????? ”???????”??

    20. ?????? 2010/05/17 ????????? ”???????”?? 20

    21. ??????? 2010/05/17 ????????? ”???????”?? 21

    22. ????????:Sheet resistance 2010/05/17 ????????? ”???????”?? 22

    23. P/N?? 2010/05/17 ????????? ”???????”?? 23

    24. CMOSFET????P/N????? ??? ???·???? 2010/05/17 ????????? ”???????”?? 24

    25. P/N?????????? ?????????????? ????????????! ???????????? ?????????????????! ??????????? S/D???????????! ? ????? ?????????????????????! ? MOSFET??? ? ???????????????? 2010/05/17 ????????? ”???????”?? 25

    26. ????????? 2010/05/17 ????????? ”???????”?? 26

    27. MOSFET???S/D??????? 2010/05/17 ????????? ”???????”?? 27

    28. ????????????? 2010/05/17 ????????? ”???????”?? 28

    29. ?????(LDD: Lightly Doped Drain) 2010/05/17 ????????? ”???????”?? 29

    30. ???···· 2010/05/17 ????????? ”???????”?? 30

    31. ??(??)? ???????? ???? ??1 :??????? ??2 :??????????? ??3 :???????? 2010/05/17 ????????? ”???????”?? 31

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