MultiMEMS MPW Design Introduction Course Part1: Introduction

1. MultiMEMS MPW Design Introduction CoursePart1: Introduction

2. The MultiMEMS Organisation • Partners: • SensoNor • SINTEF ICT • Vestfold University College (VUC) • Sattelite Access Centres (SAS) • LioniXs, the Netherlands • C2V, the Netherlands • AML, UK • Imego, Sweden • FraunHofer ISIT, Germany • MicroStencil UK

3. Nearest Airport: Torp(40 km) Where is Horten ? In Norway: 90 km South of Oslo, on thewest side of the Oslo-fjord.

4. MultiMEMS MPW Design Introduction Course • At the end of this course you should be able to: • Understand the MultiMEMS organisation. • Understand the steps involved in MPW production • Understand the limitations and the possibilities of the MultiMEMS MPW process • Understand the main laboratory processing steps • Use the MPW design handbook in design work • Have an understanding of the main possibilities and limitations of the SensoNor foundry process • Use the MultiMEMS system in product development

5. Micro- structure design kit Sensor Element Manufacture Micro- structure element Design Assembly and Packaging Test and Qualification System Integration ASIC Manufacture ASIC design kit ASIC Design Package Design Package design kit A total MST Concept 5

6. Traditional MST development • MEMS development has historically been very research oriented. • The manufacturing has been done using a project specific process in a research lab • Very costly or impossible to transform to volume production Idea Concept & feasibility Design & modelling Test & evaluation Prototyping ? 6

7. Idea Development using an industrial MST process • Established, documented and qualified (repeatable, reliable) processes developed for MEMS products • Infrastructure for support from design and development to manufacturing • Easy to ramp up to volume production since an established process is used • An established process gives confidence in cost prediction Concept & feasibility Design & modelling Test & evaluation Prototyping Qualification in system Trial series production Production ramp-up 7

8. Why Multi Project Wafer? • Share the cost with other users! • Access to industrial manufacturing process in a cost effective way • Low-cost for prototyping compared with a custom run • Can be used for low volume production • Direct transfer to high volume production 8

9. MPW Services • Today several MPW (Multi Project Wafer) services are available from MEMS Foundries. • The following MPW services are offered through Europractice: • Bulk Micromachining MPW • MultiMEMS (SensoNor) • Surface Micromachining MPW • Bosch • SOI Micromachining MPW • MEMSOI (TRONIC’S Microsystems) • MPW for diffractive optical elements • CSEM 9

10. Test & evaluation Production ramp-up Alternative access points! MultiMEMS –From Idea to Production Idea Design Houses SINTEF FrH-Isit LioniX Imego C2V AML MPW VUCSensoNor Micro-Component Production SensoNor MicroComponent Test VUCSINTEFSensoNor DELTA Concept & feasibility Design & modelling Prototyping Qualification in system Trial series production

11. Based on SensoNor’s 4th generation wafer process High-precision membrane / spring definition 3-stack glass-Si-glass Hermetically sealed Buried conductor technology (patent) Foundry processes in MultiMEMS

12. Buried Piezo resistor MPW Surface Piezo resistor Via etching Standard Processes 12

13. MultiMEMS MPW • One of SensoNor’s standard foundry processes • Four different chip sizes (3x3, 3x6, 6x3 and 6x6 mm x mm) • 10, 15 or 20 chips depending on chip size • Design tool support • Library of elements 13

14. Accelerometers SA series e.g. 20 ,30 ,50 Tyre pressure sensors SP series e.g. 10,11,12,13 Product examples 14

15. Design Examplesfrom previous MPW runs • Flow and Pressure • Gas and Thermal • Acceleration and Force

16. Flow and Pressure

17. Gas and Thermal

18. Acceleration and Force

19. Introduction • End of this chapter • Questions or comments?