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SiC_measurement

Semicon soft,Inc is the premier source of thin-film thickness measurement instrument . We are located in Southborough, MA USA. We offer various measurement instruments like thin film measurement system, optical spectroscopy , data analysis software etc. Our solution are available for a variety of applications, from desktop and to in-situ to in-line measurement.

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SiC_measurement

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  1. Thin Film Measurement solution Software, sensors, custom development and integration Thickness measurement of SiC film     A sample of SiC film on SiC substrate was measured using MProbe™ NIRScan  system in the wavelength range 2µm ‐12 µm (5000cm‐1 – 833cm‐1). SiC substrate was  high doped (~ 5*1017 /cm3) while SiC layer had lower doping (~ 5*1014/cm3 ). This  difference in doping creates an optical contrast and allowed measurement of the SiC layer  thickness using optical reflectance.  SiC (SiC‐6H) optical constants dispersion was represented using Drude‐Lorentz  oscillator approximation. The thickness was determined from the fit of the model to  measured data. Doping concentration and damping coefficient were also adjusted to  achieve best fit (see Fig. 1). SiC substrate and layer optical constants models are displayed  in Fig. 2 ‐3.   SiC has phonon resonance in the 800 cm‐1 ‐900 cm‐1 although interesting feature  in itself – it is not needed for thickness measurement.  Thickness information is contained  in the ~ 3um ‐8um (5000cm‐1 – 1250cm‐1). If we limit data to this wavelength range and  repeat the fit – we get practically the same thickness result with small reduction of  doping concentration in substrate SiC (see Fig. 4)                          Fig. 1.  Fit of the model to measurement range 3300 cm‐1 ‐833 cm‐1(3μm ‐12 μm).                                Thickess: 10.76 µm    83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

  2.               Fig. 2. SiC substrate optical constants dispersion (Drude –Lorentz model)                   Fig. 3. SiC layer optical constants dispersion (Drude –Lorentz model)                  83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

  3.               Fig. 4Fit of the model to measurement range 3300 cm‐1 ‐1250 cm‐1 (3μm ‐8 μm).                 Fig. 4Fit of the model to measurement range 3300 cm‐1 ‐1250 cm‐1 (3μm ‐8 μm).                                Thickess: 10.75 µm    83 Pine Hill Rd. Southborough, MA 01772 Phone +1.617.388.6832 Fax. +1.508.858.5473 email: info@semiconsoft.com http://www.semiconsoft.com

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