Department of Engineering

2. Department of Engineering

3. Proposal for Collaborative Research between Electrical Engineering Division, CU Engineering Department and Zeiss SMT • D M Holburn, B C Breton and N H M Caldwell

4. 1. Introduction • Zeiss SMT is the major player in the electron microscope market. To maintain and increase market share, Zeiss SMT must continuously enhance their products through innovation in both software and hardware. Innovation requires ongoing research into many aspects of microscopy, which is costly in terms of financial and personnel resources. • Collaboration with academia provides a cost-effective mechanism for speculative research and development. This proposal describes a continuing programme of research with Cambridge University Engineering Department (CUED) and Zeiss SMT under the auspices of CAPE, the newly-established Centre for Advanced Photonics and Electronics. • CAPE is an exciting new venture based around world-leading facilities and expertise in the Department of Engineering at the University of Cambridge. It builds on Cambridge's history of world-leading research in Photonics and Electronics by significantly enhancing collaboration with industry. Supported and guided by a small number of strategic industrial investors representing the global supply chain in this sector, the Centre will lead to a new form of joint university-industry research that is leading edge, vertically integrated and commercially relevant. CAPE will: • emphasise rapid application of breakthrough research by placing issues of industrial importance at the top of the research agenda; • provide a focal point for contributing companies to form strategic relationships at an early stage involving directed R&D; and • provide a focus for multidisciplinary research involving engineers, but also chemists, physicists, materials scientists and bioscientists.

5. 2. Track Record • Researchers at CUED have an impressive record in the research and development of the scanning electron microscopes. Research on the SEM dates back to 1948 and this department has had the distinction of continued research during the intervening period. In the most recent Research Assessment Exercise, the Department achieved the highest possible rating of 5*A (international and national excellence in all areas of research). • 1. Software was developed to interface LEO instruments to the Internet using Web-based technologies, providing new opportunities in remote diagnosis, operation and collaboration. This was developed by Gopal Chand, who, having completed his doctorate in aberration compensation for electron microscopy, joined LEO as a full staff member. With his participation, the CUED software was transferred to LEO and reimplemented as the commercial NetSEM package.

6. 3. Research and Development Programme • We propose a new collaborative programme to build upon the success of previous collaborations. We identify a number of key areas where advances will deliver technical know-how, tools for internal Zeiss activities, enhancements to existing and future instruments, and potential new products.

7. 3.1 Intelligent Microscopes • The XpertEze system [5, 8, 11] represented a “proof of concept” and was targeted at the LEO 440 instrument. We propose to extend its coverage of SEM operation to other instruments in the Zeiss SMT series, and, with cooperation from Zeiss, to provide knowledge bases for use in specific microscopy applications. We would aim to re-implement XpertEze as an embedded system, in a form conveniently callable from languages like VC, VB, for incorporation within the next generation of microscope software. This research will dramatically improve the ease of use of Zeiss SEMs, providing optimal imaging to customers regardless of skill level.

8. 3.2 Service Support Tools for SEM and TEM • We propose to assist Zeiss personnel in the deployment and maintenance of service support tools. This could be pursued through development of an on-line searchable database; or alternatively through further development of the First A.I.D. expert system. In addition, we propose software extensions to provide integrated diagnostic assistance for newer Zeiss microscopes (both SEM and TEM), this will yield direct savings in technical support and improved service through better fault diagnosis.

9. 3.3 Improvements in Electron-Optics Control

10. 3.4 Novel Stereo Techniques and Intelligent Stereo • Stereo imaging and stereometry represents a relatively unexploited application of the SEM. In addition to producing visually attractive images guaranteed to catch the eye at exhibitions, stereo imaging can provide specimen depth information which would be valuable in many SEM applications (see 3.6). The drawbacks of the current stereo implementation, namely its limitation to specific column design and difficult user interface, have restricted the uptake of the technique. We propose to develop new stereo techniques that can be used with conventional, variable-pressure and field-emission instruments, and to design intelligent software ‘wizards’ specific to stereo imaging to eliminate the “black art” nature of stereometry.

11. 3.5 JITS (“Just In Time Scanning”) Microscopy • Biological applications frequently require uncoated and fragile samples to be exposed to the hostile environment of the specimen chamber and the electron beam. Despite advances in variable-pressure microscopy and low voltage imaging techniques (courtesy of field-emission instruments), operators still have a limited time-frame to obtain usable results before charging and/or beam damage becomes excessive. We propose to investigate “just-in-time scanning” techniques for instrument operation to reduce the inevitable damage and extend the operator’s window of opportunity. A successful outcome will further improve the usability of Zeiss instruments in the growing medical and bioscience markets.

12. 3.6 Manipulation of Nanoscale Objects in the SEM • Nano-assembly and manipulation is becoming an increasingly important tool for characterisation of objects and also in building prototype devices. For example, nano-manipulation can be used to pick up small objects (organic nanowires, cells, laminar slices) and to place them onto electrodes or grids for characterisation. • Visualisation of the environment • Hardware development • Software development

13. 3.7 Extension of image processing capabilities • Several applications proposed above and for the future depend on efficient real time processing of image and other data. With most current instruments a single CPU is responsible for control of the instrument and all other monitoring activities as well as the user interface. We propose to investigate the suitability of multiple-processor PC architectures, allowing time consuming computational tasks (for example, Fourier Transforms, spatial filters, deconvolution, correlation, neural nets) to be devolved to a dedicated processor or processors. This will involve a study of efficient means of sharing data, as well as optimisation of the way tasks are assigned.

14. 4. Other Applications of SEM • We have become aware of numerous ways in which the use of SEM has been of immense benefit to groups within the Electrical Division, which is now consolidated on a single site in West Cambridge. It has not hitherto been possible to support more than a few of these activities on the group’s own instrument, which has been fully occupied in research; as a result, researchers have been compelled to compete for use of other instruments elsewhere in the University. Activities in which SEM has played a significant role include:- • Inspection of carbon fibres • Examination of ink/bubble jet print heads and media to establish methods for more efficient dispersal of ink; • Quality control of lithographic processing • Examination of semiconductor devices (smart power, high voltage) • Inspection and operation of micromachined cantilevers, accelerometers and other transducers and assemblies • Inspection of optical devices, fibres and couplers • Development of methods of lithography based on contamination • Quality control for fabrication of carbon nanotube materials and structures. • These projects are ongoing, and will be augmented as research at CAPE gathers momentum. There is therefore a urgentg requirement for the continued availability of a suitable SEM to support these needs.

15. Teaching Needs • 4B7 VLSI Design, Technology & CAD (20) • Practical SEM sessions: • approximately 2 hours in groups of 3-5 • 4B6 Solid State Devices (20) • 3B2 Integrated Digital Electronics (80) • SEM micrographs to demonstrate IC structures • Part IA Linear Circuits and Devices (300) • SE micrographs to illustrate device structures

16. 5. IP, Confidentiality, Project Review • Work bound by contracts negotiated with Sponsors, • Strategic Partnership Agreement (SPA) signed by the University and the Strategic Partners protects all parties. • Negotiations involve the CAPE Steering Committee, as well as the Principal Investigator and the proposed Sponsor. The terms of the Contract govern the way in which IP arising from the Project will be handled. Individual contracts may allow for IP to be licensed, exclusively or non-exclusively, to the Sponsor; or it may be assigned to the Sponsor, typically with a revenue-sharing agreement agreed between the University and the Sponsor. In other instances it may be placed in the public domain. • Members of the University are bound through their contracts of employment, as are those employed by the strategic partners. Students working on CAPE projects will be required to sign a confidentiality document.

17. 5. Project Team • David M. Holburn • Bernard C. Breton • Nicholas H.M. Caldwell

18. 6. List of Publications