'Zro 2 gate dielectric' presentation slideshows

Improving insulating property of sol-gel processed gate dielectrics

Improving insulating property of sol-gel processed gate dielectrics. Surface sol-gel ZrO 2 dielectric. Ta doping on ZrO 2 gate dielectric 10 2 times lower leakage current. As applied electric field is increased, Effectiveness of Ta-doping in decreased. Surface sol-gel ZrO 2 dielectric.

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