'Uniform ion flux' presentation slideshows

PLASMA ETCHING OF EXTREMELY HIGH ASPECT RATIO FEATURES: TWISTING EFFECTS*

PLASMA ETCHING OF EXTREMELY HIGH ASPECT RATIO FEATURES: TWISTING EFFECTS* Mingmei Wang a) , Ankur Agarwal b) , Yang Yang a) and Mark J. Kushner a) a) Iowa State University, Ames, IA 50011, USA mmwang@iastate.edu mjk@iastate.edu b) University of Illinois, Urbana, IL 61801, USA

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