'Surface micromachining' presentation slideshows

Surface micromachining - PowerPoint PPT Presentation

Microrobotics

Microrobotics

Microrobotics. Updates. Lab #4 results Lab #5 starts next week (last lab) Instructions distributed today HW #5 due today HW #6 distributed today (last HW). Introduction to Microrobotics. The physics of scaling Fabrication methods MEMS SCM Case studies MEMS gyroscope

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1.91k views • 48 slides
MEMS-specific fabrication

MEMS-specific fabrication

MEMS-specific fabrication. Bulk micromachining Surface micromachining Deep reactive ion etching (DRIE) Other materials/processes. Bulk, Surface, DRIE. Bulk micromachining involves removing material from the silicon wafer itself Typically wet etched Traditional MEMS industry

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982 views • 40 slides
MEMS-specific fabrication

MEMS-specific fabrication

MEMS-specific fabrication. Bulk micromachining Surface micromachining Deep reactive ion etching (DRIE) Other materials/processes. Bulk, Surface, DRIE. Bulk micromachining involves removing material from the silicon wafer itself Typically wet etched Traditional MEMS industry

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414 views • 40 slides
SURFACE MICROMACHINING

SURFACE MICROMACHINING

SURFACE MICROMACHINING. In surface micromachining the Si substrate is primarily used as a mechanical support upon which the micromechanical elements are fabricated. The three-dimensional structures are mainly located on the surface of the Si wafer and consist of thin films.

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288 views • 16 slides
Introduction to MEMS Design and Fabrication

Introduction to MEMS Design and Fabrication

Introduction to MEMS Design and Fabrication. Kristofer S.J. Pister Berkeley Sensor and Actuator Center UC Berkeley. A brief history of MEMS. 1750s first electrostatic motors (Benjamin Franklin, Andrew Gordon) 1824 Silicon discovered (Berzelius)

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214 views • 14 slides
NANO 230

NANO 230

NANO 230. Biological Nanoscience. Nano #@$&^*. Conventional labeling. Organic fluorophores. fluorescein. Quantum Dot Labels. Photoluminescent Structure. Bio-self assembly. Bio-self assembly. DNA mediated assembly. DNA Mediated Assembly and Delivery. Nanoparticle Photothermal Therapy.

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125 views • 12 slides

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