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Single crystal silicon layers - PowerPoint PPT Presentation

Monolithic 3D-ICs with Single Crystal Silicon Layers

Monolithic 3D-ICs with Single Crystal Silicon Layers. Deepak C. Sekar and Zvi Or-Bach MonolithIC 3D Inc. 2012 IEEE 3D System Integration Conference. Flash Industry Aggressively Moving Towards Monolithic 3D Technology. Multiple layers of polysilicon transistors.

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673 views • 46 slides

THE MONOLITHIC 3D-IC: Logic + eDRAM on top

THE MONOLITHIC 3D-IC: Logic + eDRAM on top . How get single crystal silicon layers at less than 400 o C (Required for stacking atop copper/low k). How are all SOI wafers manufactured today?. Cleave using 400 o C anneal or sideways mechanical force. CMP. Hydrogen implant of top layer.

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496 views • 25 slides

The Short, Medium and Long-Term Path to the 3D Ecosystem Panel Discussion at EDPS

The Short, Medium and Long-Term Path to the 3D Ecosystem Panel Discussion at EDPS A Monolithic 3D-IC Perspective Deepak C. Sekar. Two Types of 3D Technology. 3D-TSV Transistors made on separate wafer @ high temperature, then thin + align + bond. Monolithic 3D

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181 views • 7 slides

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Single crystal silicon layers - PowerPoint PPT Presentation

Monolithic 3D-ICs with Single Crystal Silicon Layers

THE MONOLITHIC 3D-IC: Logic + eDRAM on top

The Short, Medium and Long-Term Path to the 3D Ecosystem Panel Discussion at EDPS