'Si etch' presentation slideshows

Lecture 11.0

Lecture 11.0. Etching. Etching. Patterned Material Selectivity is Important!! Un-patterned. Dry Etch An-isotropic dy/dt:dx/dt:6 Gas Phase Reaction with volatile products Frequent use of very reactive species in a Plasma Si Etch SiO 2 Etch Metal Etch. Wet Etch =Dissolution

483 views • 30 slides

ONEBAT Meeting November 17, 2005

ONEBAT Meeting November 17, 2005. EPFL contribution Samuel Rey-Mermet, Paul Muralt. Outline. New design for PEN New photolithographic masks for PEN Process flow CGO dry etching Lift-off Ni plating Patent Main achievements Milestones Future work. New designs for PEN.

426 views • 19 slides

278 views • 10 slides

Further Etching

Pattern after Pd and Cr etch. Pattern after HF and Si etch. Further Etching.

240 views • 1 slides