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ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS

ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS CONSIDERING WAVE EFFECTS* Yang Yang a) and Mark J. Kushner b) a) Department of Electrical and Computer Engineering Iowa State University, Ames, IA 50011, USA yangying@iastate.edu

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Shortens plasma - PowerPoint PPT Presentation

ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS