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SECS/GEM ,the communication interface protocol for communication between a semiconductor equipment and fab host. Fab host is a software application that is controlling and monitoring equipment processing using SECS/GEM protocol. SECS/GEM complaint equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 - HSMS) or RS-232 (using SEMI standard E4 – SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products and change variables. With SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model), all this can be performed in a standard way. SECS/GEM protocol has been standardized by the non-profit association SEMI (Semiconductor Equipment and Materials International). Check www.SEMI.org to learn more about SEMI standards and SECS/GEM protocol. Among the capabilities offered by the SECS/GEM standard is – • For fab host to start and stop processing • For fab host to select, download and upload recipes from/to the equipment • For fab host to query the equipment for values of various process parameters and equipment configuration • For fab host to set equipment configuration parameter values • For equipment to send alarms to the fab host • For fab host to define reports of various variables and associate them with events such as lot start or wafer complete • For equipment to send various events and associated reports to the fab host
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