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NEG films: recent R&D progress Paolo Chiggiato (for the EST-SM-DA section)

Vacuum Issues of the LHCb Vertex Detector 28 November 2000. NEG films: recent R&D progress Paolo Chiggiato (for the EST-SM-DA section). Summary. - Higher substrate temperature during deposition - Clean gas venting - Other. - NEG films: choice and production - Pumping speed -Ageing.

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NEG films: recent R&amp;D progress Paolo Chiggiato (for the EST-SM-DA section)

NEG films: recent R&D progress Paolo Chiggiato (for the EST-SM-DA section)