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X-ray Lithography

X-ray Lithography. physical synthesis of nanostructures. 20 nm. Scott Allen Physics Department University of Guelph. 60 nm. Chen et al., Electrophoresis, 2001 . Outline. What is lithography?. What are x-rays?. x-ray lithography (XRL). production of x-rays. x-ray interactions. mask.

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X-ray Lithography