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KGD Probing of TSVs at 40 um Array Pitch

KGD Probing of TSVs at 40 um Array Pitch . 3D-TSV Probe Technology Goals MEMS probe tip evolution Contact performance TSV pad damage (or lack thereof) Conclusions. Ken Smith, Peter Hanaway, Mike Jolley, Reed Gleason, Chris Fournier, and Eric Strid. 3D-TSV Probe Technology Development Goals.

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Pitch array - PowerPoint PPT Presentation

KGD Probing of TSVs at 40 um Array Pitch