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Measurements of Piezoresistive Coefficients in Lightly Doped (111) Silicon

Measurements of Piezoresistive Coefficients in Lightly Doped (111) Silicon. Chun Hyung Cho & John Sunwoo Electrical & Computer Engineering Auburn University. OUTLINE. Introduction Piezoresistive Theory Results of Measurements Discussion Conclusion. INTRODUCTION.

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Piezoresistive Sensors

Piezoresistive Sensors. EE485A Lecture Oct. 6, 2009. Piezoresistivity. Resistivity dependent on strain True for most semiconductors, including Si Also used to describe metal resistors where resistance change is geometry-driven (strain gauges)

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1.07k views • 10 slides

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Piezoresistive sensors - PowerPoint PPT Presentation

Measurements of Piezoresistive Coefficients in Lightly Doped (111) Silicon

Piezoresistive Sensors