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Thermoplastic NIL of P(VDF- TrFE -CFE)

Thermoplastic NIL of P(VDF- TrFE -CFE) . Si chips are cleaved and cleaned Spin-coating of OmniCoat on Si Spin-coating of P(VDF- TrFE -CFE) on OmniCoat The Si stamp is silanized Optical alignment performed Heating and compression The upper chip is removed

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Thermoplastic NIL of P(VDF- TrFE -CFE)