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Mems fabrication - PowerPoint PPT Presentation


ES 176/276 – Section # 2 – 09/19/2011

ES 176/276 – Section # 2 – 09/19/2011

ES 176/276 – Section # 2 – 09/19/2011. Brief Overview from Section #1. MEMS = MicroElectroMechanical Systems. Micron-scale devices which transduce an environmental perturbation. Transduction: conversion of one form of energy to another

★ ★ ★ ★ ★

573 views • 45 slides



ES 176/276 – Section # 2 – 09/19/2011

ES 176/276 – Section # 2 – 09/19/2011

ES 176/276 – Section # 2 – 09/19/2011. Brief Overview from Section #1. MEMS = MicroElectroMechanical Systems. Micron-scale devices which transduce an environmental perturbation. Transduction: conversion of one form of energy to another

★ ★ ★ ★ ★

622 views • 45 slides


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