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Chemical Mechanical Polishing for Manufacturing of Smooth Nb Surfaces

Chemical Mechanical Polishing for Manufacturing of Smooth Nb Surfaces George Calota 1 , Natalia Maximova 2 , Katherine Ziemer 2 and Sinan Muftu 1,3 1 Department of Mechanical Engineering 2 Department of Chemical Engineering 3 NSF-NSEC-Center for High-rate Nanomanufacturing

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Mass removal rate nb - PowerPoint PPT Presentation

Chemical Mechanical Polishing for Manufacturing of Smooth Nb Surfaces