Koh etching - PowerPoint PPT Presentation

MEMS-specific fabrication

MEMS-specific fabrication. Bulk micromachining Surface micromachining Deep reactive ion etching (DRIE) Other materials/processes. Bulk, Surface, DRIE. Bulk micromachining involves removing material from the silicon wafer itself Typically wet etched Traditional MEMS industry

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1.07k views • 40 slides

MEMS-specific fabrication

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454 views • 40 slides

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