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8 MEMS Packaging

MEMS MOEMS Nano. Workshop. 8 MEMS Packaging. Ken Gilleo PhD ET-Trends LLC. Packaging Classification. Package discrete MEMS device (non-WLP) Partial WLP; pre-packaging; e.g. capping Total WLP Bond protective wafers with vias Bond protective wafers with vias in MEMS

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8 MEMS Packaging