Field oxide - PowerPoint PPT Presentation

Twin Well CMOS Fabrication Process

Twin Well CMOS Fabrication Process. In this lecture, you will learn the process integration in the fabrication of CMOS transistors. Read : C.Y. Chang and S.M. Sze “ULSI Technology”,McGraw-Hill, (1996), pp. 473-495.

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1.4k views • 31 slides

Side View

Beginning from a silicon wafer. Side View. Top View. Thermal Oxidation. Side View. Top View. Spin-on Photo Resist (PR). Side View. Top View. Alignment, UV Expose and Develop Photo Resist (PR). Side View. Top View. Oxide Etched. Side View. Top View. Remove Photo Resist (PR).

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512 views • 22 slides

P-sub

P-sub. NW. PP. OD. contact. Poly. P-sub. NW. PP. OD. matel. contact. Poly. N-well. P-sub. NW. N-well. PP. OD. contact. Poly. N-well. As. PR. N-well. P-sub. Field Oxide. P-sub. NW. PP. OD. Field Oxide. contact. Poly. Field Oxide. CF4. CF4. PR. SiNx.

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249 views • 17 slides

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