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More Moore SP3-WP6, 12. -13.05. 2005 Review meeting Athens

More Moore SP3-WP6, 12. -13.05. 2005 Review meeting Athens

More Moore SP3-WP6, 12. -13.05. 2005 Review meeting Athens. High resolution and low LER EUV resist. Specific objectives for SP3 WP6. Objectives High resolution and low LER EUV resist for 22 nm Node 1. Characterize and understand the limiting parameters of CAR resist for high resolution

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214 views • 21 slides
Introduction More Moore, Resist Part for joint workshop of EUV Projects

Introduction More Moore, Resist Part for joint workshop of EUV Projects

Introduction More Moore, Resist Part for joint workshop of EUV Projects Medea+ T 406 Excite, WP1 Resist and European Communities FP6, More Moore SP3 WP6 Athens 12.Mai 2005. EUV evaluation in Europe. EU Comm., FP6 Frame Project. MEDEA + Projects. R&D Objectives. EXTATIC T403

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306 views • 16 slides
Introduction More Moore, Resist Part for joint workshop of EUV Projects

Introduction More Moore, Resist Part for joint workshop of EUV Projects

Introduction More Moore, Resist Part for joint workshop of EUV Projects Medea+ T 406 Excite, WP1 Resist and European Communities FP6, More Moore SP3 WP6 Athens 12.Mai 2005. EUV evaluation in Europe. EU Comm., FP6 Frame Project. MEDEA + Projects. R&D Objectives. EXTATIC T403

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165 views • 16 slides
EUV Resist Evaluation ExCite T406 and More Moore, SP3 WP6,

EUV Resist Evaluation ExCite T406 and More Moore, SP3 WP6,

EUV Resist Evaluation ExCite T406 and More Moore, SP3 WP6, Objective: Evaluation of resist for EUV Lithography at 45nm, 32nm, 22nm node AZ Electronic Materials Athens 12.Mai 2005. Concepts and results

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236 views • 13 slides

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