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Plasma Removal Process

Plasma Removal Process. Outline. Introduction Models to understand the plasma process Chemistry Analyzing recipe parameters, and the resultant etch profiles Endpoint. Sidewall Passivation. Sidewall passivation can be used in an etch process to control sidewall profile

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581 views • 51 slides

SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS *

SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS * Sang-Heon Song a) and Mark J. Kushner b) a) Department of Nuclear Engineering and Radiological Sciences University of Michigan, Ann Arbor, MI 48109, USA ssongs@umich.edu

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361 views • 25 slides

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Etch profile - PowerPoint PPT Presentation

Plasma Removal Process

SiO 2 ETCH PROPERTY CONTROL USING PULSE POWER IN CAPACITIVELY COUPLED PLASMAS *