'Dry etch' presentation slideshows

McGill Nanotools Microfabrication Processes

McGill Nanotools Microfabrication Processes. Matthieu Nannini Manager URL :: miam2.physics.mcgill.ca. Microfabrication Add material Remove material Pattern material To the outside world Process flow example Idea to device Conclusion. Outline. Atmospheric Chemical Vapour Deposition

438 views • 20 slides

Microgear Transmission Process Sequence Diagram

167 views • 16 slides

Top Down Method

Top Down Method. Plasma Etch and the MATEC Plasma Etcher Simulation. Plasma (dry) Etch Advantages. No need for immersion More precise control of etch feature sizes More rapid than chemical etch without plasma assist Plasma can create reactive species in gases

376 views • 14 slides

3 MEMS FABRICATION

MEMS MOEMS Nano. Workshop. 3 MEMS FABRICATION. Ken Gilleo PhD ET-Trends LLC. 24%. Silicon Aluminum Si 3 N 4 (Nitride) GaAs SiC Polymers. SiO 2 Copper Aluminum Polymers SiGe Silicon. MEMS Material Classes. Structures. Sacrificial.

739 views • 14 slides

Quartz Product ??

Quartz Product ??. June. 2011 Nanoinside Inc. Content. Tube, Boat, Assembly Dry Etch & Wet Etch 3. Thin Film & RTP 4. MOCVD for LED 5. Contact Information. 1. Tube , Boat & Assembly. 2. Dry Etch & Wet Etch parts. 3. Thin Film & RTP parts. 4. LED MOCVD. Gas injector.

192 views • 9 slides