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Microelectronics Processing Lithography

Microelectronics Processing Lithography. Photolithography. Photolithography is the sequence of activities needed for transfer a pre-designed pattern to the surface of a semiconductor wafer . The pattern can be registered on a mask, or supplied directly from a computer to a scanning

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Lithography

Lithography. Topics: Wafer exposure systems Photoresists Manufacturing Methods & Equipment Measurement Methods. Projected Lithography Requirements. Projection systems. Proximity Printing : Mask/wafer separated 5-25 m m Separation results in poor resolution

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Deep uv resists - PowerPoint PPT Presentation

Microelectronics Processing Lithography

Lithography