Copper metallization - PowerPoint PPT Presentation

Copper Metallization Technology

Copper Metallization Technology. Michael .A. Awaah Elec 7730 Advanced Plasma Processing for Microelectronic Fabrication (Second Presentation) Instructor: Dr. Y. TZENG. Outline. Overview/Introduction Questions Al interconnects Copper Interconnects Damascene Technology

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Next Generation Integrated Circuits

Next Generation Integrated Circuits. 300 mm wafers Copper metallization Low-K dielectric under interconnect lines High-K dielectric under gate Silicon-on-insulator (SOI) Strained silicon New gate metals Dual-core CPU chips. Next Generation Integrated Circuits. 300 mm wafers

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