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Probe Measurements of Electron Energy Distributions in Gas Discharge Plasmas V. A. Godyak 1 and V. I. Demidov 2

Probe Measurements of Electron Energy Distributions in Gas Discharge Plasmas V. A. Godyak 1 and V. I. Demidov 2 1 RF Plasma Consulting, Brookline, MA 02446, USA 2 West Virginia University, Morgantown, WV 26506, USA . Electron Distribution Function f. , .

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Continuous probe - PowerPoint PPT Presentation

Probe Measurements of Electron Energy Distributions in Gas Discharge Plasmas V. A. Godyak 1 and V. I. Demidov 2