Comb drive - PowerPoint PPT Presentation

Flexures for Optics

Flexures for Optics. Outline. Brief overviews of micro flexures Focus on macro flexures in this tutorial Beam bending Symmetry -&gt; precision Degree of freedom (DOF) Applications. Micro Flexures. Tip-tilt mirrors discrete vs analog. Comb drive. Optical MEMS devices.

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909 views • 26 slides

Flexures for Optics

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288 views • 26 slides

3 rd Generation Device Design

Multi-Axial. Theoretical Resonance. Experimental Resonance. Fatigue Device ( m m m). Frequency (kHz). Frequency (kHz). 30x4x2. 52.75. 52.30. 40x4x2. 45.95. 45.42. 50x4x2. 38.83. 37.82. 60x4x2. 32.17. 31.24. 70x4x2. 26.50. 25.50. S. D. 80x4x2. 21.87. 21.03. S. D. D.

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168 views • 3 slides

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