'Bosch process' presentation slideshows

Deep Etching Systems for Silicon and Silicon Dioxide

Deep Etching Systems for Silicon and Silicon Dioxide. Robert Dean Presentation 1 October 13, 2003. Questions. How does the Bosch process reduce sidewall etching? In the AOE process, what effect does increasing the H 2 concentration have on the etch rate?. Introduction. Terminology

679 views • 43 slides

Nitrogen, Sulfur, and the Scientific Method

356 views • 24 slides

CMI etchers

Dry etching in MEMS fabrication by Cyrille Hibert in charge of etching activities in CMI clean room. CMI etchers. Alcatel 601E. STS Multiplex ICP. Other etcher manufacturers for MEMS processing: Oxford, Unaxis, AKT (Applied Material). ICP reactors. Basic of ICP reactors.

526 views • 18 slides

Do Now

280 views • 12 slides

912 views • 9 slides