'Anisotropic etching' presentation slideshows

Anisotropic etching - PowerPoint PPT Presentation

Chapter 10 ETCHING

Chapter 10 ETCHING

Chapter 10 ETCHING. CONTENTS. Introduction Basic Concepts Wet etching Plasma etching Manufacturing Methods Plasma etching conditions and issues Plasma etch methods for various films Measurements Methods Models and Simulations Limits and Future Trends. Introduction.

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1.26k views • 74 slides
Chapter 10 ETCHING

Chapter 10 ETCHING

Chapter 10 ETCHING. CONTENTS. Introduction Basic Concepts Wet etching Plasma etching Manufacturing Methods Plasma etching conditions and issues Plasma etch methods for various films Measurements Methods Models and Simulations Limits and Future Trends. Introduction.

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2.45k views • 74 slides
Chapter 9: Micro Structure Technology and Micromachined Devices

Chapter 9: Micro Structure Technology and Micromachined Devices

Chapter 9: Micro Structure Technology and Micromachined Devices. Picture shows the interior chip assembly of the S A30 Crash Sensor, a microsystem from SensoNor, Norway.

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795 views • 61 slides
MEMS devices: How do we make them?

MEMS devices: How do we make them?

MEMS devices: How do we make them?. A mechanism. Gear chain Hinge Gear within a gear. Sandia MEMS. Basic MEMS materials Silicon and its derivatives, mostly. Micro-electronics heritage Si is a good semiconductor, properties can be tuned Si oxide is very robust

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785 views • 39 slides
MEMS devices: How do we make them?

MEMS devices: How do we make them?

MEMS devices: How do we make them?. A mechanism. Gear chain Hinge Gear within a gear. Sandia MEMS. Basic MEMS materials Silicon and its derivatives, mostly. Micro-electronics heritage Si is a good semiconductor, properties can be tuned Si oxide is very robust

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874 views • 39 slides
MEMS devices: How do we make them?

MEMS devices: How do we make them?

MEMS devices: How do we make them?. A mechanism. Gear chain Hinge Gear within a gear. Sandia MEMS. Basic MEMS materials Silicon and its derivatives, mostly. Micro-electronics heritage Si is a good semiconductor, properties can be tuned Si oxide is very robust

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774 views • 37 slides
MEMS devices: How do we make them?

MEMS devices: How do we make them?

MEMS devices: How do we make them?. A mechanism. Gear chain Hinge Gear within a gear. Sandia MEMS. Basic MEMS materials Silicon and its derivatives, mostly. Micro-electronics heritage Si is a good semiconductor, properties can be tuned Si oxide is very robust

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378 views • 37 slides
Wet Bulk Micromachining

Wet Bulk Micromachining

Wet Bulk Micromachining. Dr. Marc Madou, Fall 2012 UCI Class 8. http://research.et.byu.edu/llhwww/intro/Fig2.jpg. Table of Content. Single crystal growth Si lattice structure Miller Indices Wafer flats Isotropic and anisotropic etching Example. Bulk Micromachining.

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570 views • 20 slides
CMI etchers

CMI etchers

Dry etching in MEMS fabrication by Cyrille Hibert in charge of etching activities in CMI clean room. CMI etchers. Alcatel 601E. STS Multiplex ICP. Other etcher manufacturers for MEMS processing: Oxford, Unaxis, AKT (Applied Material). ICP reactors. Basic of ICP reactors.

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527 views • 18 slides

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