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Noise Reduction Of Si x Ge 1-x and Si x Ge 1-x O y Bolometers by Forming Gas Passivation

Noise Reduction Of Si x Ge 1-x and Si x Ge 1-x O y Bolometers by Forming Gas Passivation. Mukti Rana and Donald Butler University of Texas at Arlington Electrical Engineering Dept. Arlington, TX 76019 Based in part by work supported by the National Science Foundation ECS-0322900.

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169 views • 7 slides

Bolometer Fabrication

Bolometer Fabrication. Ashing of PI2737 in Oxygen Plasma. Au Contact. Au Absorber. SiGe. PI 2737 Sacrificial Layer. Al Mirror. Ti Arm. SiN Insulation Layer. P- Si Substrate. Completed Bolometer : SEM Picture.

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333 views • 7 slides

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Al mirror - PowerPoint PPT Presentation

Noise Reduction Of Si x Ge 1-x and Si x Ge 1-x O y Bolometers by Forming Gas Passivation

Bolometer Fabrication