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1000o2 tin - PowerPoint PPT Presentation

Lam2300 ??????????? ????

Lam2300 ??????????? ????. ????????? : Poly gate Film Stack etch. Poly CD map. 91.3 nm. ER summary. Poly. Oxide. PR. Poly ME. Poly OE. ????????? : Poly film Base Line E/R Test Result. ADI:135nm. PR 250nm. BARC 96nm. PSG 870nm. SiN200 nm. ????????? : Exelan OX Contact Film Stack.

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1000o2 tin - PowerPoint PPT Presentation

Lam2300 ??????????? ????