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SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity

SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity. SEMI Software Standards Enabling Equipment Productivity & Performance Data Collection Blaine Crandell Blaine Crandell & Associates blainecrandell@aol.com. Information & Control Committee Charter.

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SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity

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  1. SEMICON West 2006 STEPMethods to Measure/Improve Equipment Productivity SEMI Software Standards Enabling Equipment Productivity & Performance Data Collection Blaine Crandell Blaine Crandell & Associates blainecrandell@aol.com

  2. Information & Control Committee Charter SEMI software standards developed by Information & Control Committee, whose charter is: To explore, evaluate, discuss, and formulate consensus based specifications that, through voluntary compliance, will enhance the manufacturing capability of the semiconductor industry. Its scope is limited to exploring and developing standards thatpertain to theinterface of manufacturing tools to each other, to control computers, or to human operators, for the purpose of transferring commands and data used during the manufacturing process. SEMICON West 2006 STEP

  3. Standards Supporting Equipment Performance Data Collection Key Software Standards • E4 – SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) • E5 – SEMI Equipment Communications Standard 2 MESSAGE CONTENT (SECS-II) • E30 – Generic Model for Communications and Control of Manufacturing Equipment (GEM) • E37 – High-Speed SECS Message Services (HSMS) Generic Services • E39 – Object Services Standard: Concepts, Behavior, and Services • E58 – Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior and Services • E116 – Specification for Equipment Performance Tracking • E120 – Specification for the Common Equipment Model (CEM) SEMICON West 2006 STEP

  4. Production equipment Production equipment Generic Data Collection System Architecture User Interfaces Manufacturing Execution System User Interfaces Host Controller Host Controller MES Host Controller Host Controller E5 (SECS-II )/ E4 (SECS-I) E5 (SECS-II) / E37 (HSMS) SEMICON West 2006 STEP

  5. E39 - OSS E39 – OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOR, AND SERVICES (OSS) • Originally published in 1995 • Developed by a task force under the SEMI Information & Control Committee • Last revised in 2003 (SEMI E39-0703) SEMICON West 2006 STEP

  6. E39 - OSS • Provides general terminology, conventions, and notation for describing behavior and data in terms of objects and object attributes. • Provides basic services for reading object attributes, setting their values, and for asking for an object's contents. • Intended to be referenced by other standards which define specific objects to reduce redundancy. SEMICON West 2006 STEP

  7. E120 - CEM E120 – SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) • Originally published in 2003 • Developed by a task force under the SEMI Information & Control Committee • Last revised in 2006 (SEMI E120-0706) SEMICON West 2006 STEP

  8. E120 - CEM • Provides a generally applicable object model of semiconductor equipment structure. • Intended Usage • Guide to equipment suppliers on how to represent the external view of their equipment to the factory host • Base model to be used and extended by other SEMI equipment communication standards • Reference for the creation of technology-specific object model definitions, such as XML schema SEMICON West 2006 STEP

  9. E5 – SECS-II E5 – SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II) • Originally published in 1982 • Developed by a task force under the SEMI Information & Control Committee • Last revised in 2006 (SEMI E5-0706) SEMICON West 2006 STEP

  10. E5 – SECS-II • Specifies a message protocol defining the details of the messages exchanged between semiconductor equipment and host control systems • Gives form and meaning to messages exchanged between equipment and host using a message transfer protocol, such as SECS-I (E4) or HSMS (E37) • Enables the semiconductor manufacturer to develop standard, reusable “host control” systems to: • Automate equipment control (to prevent misprocessing due to human error) • Provide automated data collection • Provide alarm handling • Creates categories (streams) of messages to support similar or related activities SEMICON West 2006 STEP

  11. E5 – SECS-II • Stream 1 Equipment Status • Stream 2 Equipment Control and Diagnostics • Stream 3 Material Status • Stream 4 Material Control • Stream 5 Exception Handling • Stream 6 Data Collection • Stream 7 Process Program Management • Stream 8 Control Program Transfer • Stream 9 System Errors • Stream 10 Terminal Services • Stream 11 Host File Services (Deleted) • Stream 12 Wafer Mapping • Stream 13 Data Set Transfers • Stream 14 Object Services • Stream 15 Recipe Management • Stream 16 Processing Management • Stream 17 Equipment Control and Diagnostics • Stream 18 Subsystem Control and Data SEMICON West 2006 STEP

  12. E30 - GEM E30 – GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) • Originally published in 1992 • Developed by a task force under the SEMI Information & Control Committee • Last revised in 2003 (SEMI E30-1103E) SEMICON West 2006 STEP

  13. E30 - GEM • E30 defines a Processing State Model for semiconductor equipment, and standard automated messages that can used by a host computer to control equipment activity and receive equipment processing data. • E30 proposed as Equipment Utilization enabler by Jerry Secrest in “Using GEM to measure Equipment Utilization” [Solid State Technology, June 1998]. • Use E30 with a simple spreadsheet to provide straightforward method to measure equipment utilization • E30 is not largely used for equipment performance tracking. • Does not specify standard messages that indicate state transitions in the Processing State Model SEMICON West 2006 STEP

  14. E30 – GEM Processing State Model SEMICON West 2006 STEP

  15. E30 – GEM The GEM standard defines which SECS-II messages should be used, in what situations, and what the resulting activity should be. SEMICON West 2006 STEP

  16. E30 – GEM • Equipment Capabilities and Activities • Establish Communications • Data Collection • Alarm Management • Remote Control • Equipment Constants • Process Program Management • Material Movement • Equipment Terminal Services • Error Messages • Clock • Spooling • Control SEMICON West 2006 STEP

  17. E58 - ARAMS E58 – AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES • Originally published in 1997 • Developed by a joint task force under the SEMI Information & Control Committee (primary) and the SEMI Metrics Committee • Last revised in 2003 (SEMI E58-0703) SEMICON West 2006 STEP

  18. E58 - ARAMS • Maps automated equipment messages to E10 states • Provides a method for production equipment to report E10 state changes to a host computer • Provides standard equipment codes for representing substates of the six E10 equipment states • Provides a method, through the human interface, for a user to select a state and substate combination, that results in an ARAMS substate code • The equipment then determines the appropriate ARAMS state/substate based on this code. SEMICON West 2006 STEP

  19. E58 - ARAMS ARAMS State Model SEMICON West 2006 STEP

  20. E58 - ARAMS Substates PRODUCTIVE 1000 “PRD” (default productive code) 1100 “PRD/Regular production” 1200 “PRD/Work for third parties” 1300 “PRD/Rework” 1400 “PRD/Engineering runs” 1500 “PRD/Reserved*” 1600 “PRD/Reserved” 1700 “PRD/Reserved” 1800 “PRD/Reserved” 1900 “PRD/Reserved” SEMICON West 2006 STEP

  21. E58 - ARAMS Substates STANDBY 2000 “SBY” (default standby code) 2100 “SBY/No operator” 2200 “SBY/No product” 2300 “SBY/No support tool”* 2400 “SBY/Associated cluster module down” 2500 “SBY/No host” 2600 “SBY/Reserved” 2700 “SBY/Reserved” 2800 “SBY/Reserved” 2900 “SBY/Reserved” SEMICON West 2006 STEP

  22. E58 - ARAMS Substates ENGINEERING 3000 “ENG” (default engineering code) 3100 “ENG/Process experiments” 3200 “ENG/Equipment experiments” 3300 “ENG/Reserved” 3400 “ENG/Reserved” 3500 “ENG/Reserved” 3600 “ENG/Reserved” 3700 “ENG/Reserved” 3800 “ENG/Reserved” 3900 “ENG/Reserved” SEMICON West 2006 STEP

  23. E58 - ARAMS Substates SCHEDULED DOWNTIME 4000 “SDT” (default scheduled downtime code) 4100 “SDT/User maintenance delay” 4200 “SDT/Supplier maintenance delay” 4300 “SDT/Preventive maintenance” 4400 “SDT/Change of consumables” 4500 “SDT/Setup” 4600 “SDT/Production test” 4700 “SDT/Facilities-related” 4800 “SDT/Reserved” 4900 “SDT/Reserved” SEMICON West 2006 STEP

  24. E58 - ARAMS Substates UNSCHEDULED DOWNTIME 5000 “UDT” default unscheduled downtime code) 5100 “UDT/User maintenance delay” 5200 “UDT/Supplier maintenance delay” 5300 “UDT/Repair” 5400 “UDT/Out-of-spec input material” 5500 “UDT/Change of consumables” 5600 “UDT/Facilities-related” 5700 “UDT/Reserved” 5800 “UDT/Reserved” 5900 “UDT/Reserved” SEMICON West 2006 STEP

  25. E58 - ARAMS Substates NON-SCHEDULED TIME 6000 “NST” (default non-scheduled downtime code) 6100 “NST/Unworked shifts” 6200 “NST/Equipment installation” 6300 “NST/Equipment modifications” (modify, rebuild, upgrade) 6400 “NST/Off-line training” 6500 “NST/Shutdown/startup” 6600 “NST/Reserved” 6700 “NST/Reserved” 6800 “NST/Reserved” 6900 “NST/Reserved” SEMICON West 2006 STEP

  26. E58 - ARAMS • Some IC Makers have reported success in using ARAMS to obtain accurate E10 data. • ARAMS’ requirement that equipment automatically transition to unscheduled downtime for even insignificant alarm conditions may be inappropriate in some factories. • ARAMS is complex and difficult for equipment suppliers to implement. • Concerns exist regarding the accuracy of user input required to transition between ARAMS states. Many IC Makers do not want to rely on error-prone human input that results in erroneous equipment performance data. • Few IC Makers include E58 in their equipment purchase specifications. • Few equipment suppliers have implemented E58. SEMICON West 2006 STEP

  27. E116 - EPT E116 - SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING (EPT) • Originally published in 2002 • Developed by a joint task force under the SEMI Information & Control Committee (primary) and the SEMI Metrics Committee • Last revised in 2006 (SEMI E116-0706) SEMICON West 2006 STEP

  28. E116 - EPT • Defines equipment behavior states • Tracks and reports basic equipment states in a modular manner, for both major modules and the overall equipment • Enables tracking of equipment’s time in state, at both module and equipment level • Reports reasons to a host computer for why equipment is blocked from performing its task, at both module and equipment level SEMICON West 2006 STEP

  29. E116 - EPT SEMICON West 2006 STEP

  30. E116 - EPT Key Points • Concentrates solely on data collected from the equipment without manual intervention • Key Requirements • Modularization • Idle, Busy, and Blocked events (time-stamped) with reason for transition from one state to another • Does not focus on E10 state information • IC Maker can calculate E10 accurately from equipment data combined with MES information. SEMICON West 2006 STEP

  31. E116 - EPT • E116 is the preferred standard for tracking equipment performance data. • Some IC Makers are requesting E116 compliance in equipment purchase specifications. • Some equipment suppliers have implemented E116 in their equipment. SEMICON West 2006 STEP

  32. Summary Software standards enabling equipment performance monitoring are available now. They are improving and can provide reliable and accurate equipment performance data. SEMICON West 2006 STEP

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