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  1. Industrial kick-off meeting Purpose: Inspire the design of the demonstrators to be developed Place: Acreo AB, Electrum 236, Isafjordsgatan 22, SE-164 40 Kista, Stockholm Program: 10.00-10.10 Arrival 10.10-10.20 Welcome and introduction to COSMOS by Lars Pleth Nielsen, DTI 10.20-10.30 Ultra short presentation around the table (1-2 min per head) 10.30-12.00 Technical presentation by the industry on interesting applications for testing the concept of surface embedded sensor 12.00-13.00 Lunch 13.00-14.00 Common COSMOS technical presentation: Acreo, DTI, SINTEF, VTT 14.00-15.00 Discussion on possibilities. Can we define a common object? 15.00-15.15 Short presentation of Acreo 15.15-15.30 Short presentation of SINTEF 15.30-15.45 Short presentation of VTT 15.45-16:00 Short presentation of Danish Technological Institute (DTI) 16.00-dep. Summing up, comments, conclusion

  2. COSMOS Components and Smart Machines with Micro-Nano Surface Embedded Sensors

  3. The Vision • Improved interaction between human and machines. • Smart machines with imbedded sensors will improve safety, lifetime and performance. • Short periods with improper operation with critical parameters may be avoided. • Create intelligent surfaces of the future.

  4. From passive to active coatings, patents

  5. The Budget • Total budget 5.000.000 NOK • 2.000.000 from Nordisk Innovation center • 3.000.000 from the four RTD partners • Start ~1/8, 2006 • Stop ultimo 2007 Signed contract Second round First round go Jan 2006 Marts 2006 May 2006 August 2006 Time

  6. The Goal Develop a sensor embedded under a functional hard coating, i.e. a self lubricating diamond like carbon (DLC) coating. CVD DLC CrC-CrN layer Embedded Sensor Substrate

  7. Make a 3D industrial relevant demonstrator • Temperature • Pressure Sensor Conference Spec. Object Meeting Meeting Oct., 2006 Feb., 2007 Aug., 2007 Nov., 2007 Jan., 2008 Wafer Flat steel 3D-object Embedded sensor Litho. Flexible Shadow mask Shadow mask

  8. The Team • Acreo • Christian Vieider, Magnus Svensson • Sintef, • N. Peter Østbø • Danish Technological Institute • Lars Pleth Nielsen • VTT • Helena Ronkainen The Industry

  9. Cross-disciplinary task Sensor design and technology 3D structurization Sensor test Surface embedded sensors Coating test Interface: Wiring and electronics DLC coating technology

  10. Acreo AB, Sweden Responsible: Christian Vieider, Ph.D., Manager Sensors Industrial Nano and Micro Technology Magnus Svensson, Microelectronics Contribution: • 3D-micro structuring • Sensor design • Wiring and electronic connectors to sensor unit • Interface to the surrounding

  11. SINTEF/MiNaLAB, Norway Responsible: Research Scientist, Ph.D. (Dr. ing.) N. Peter Østbø Contribution: • Know-how and capability within piezoelectric thin films • Plasma-enhanced Si3N4 (restricted to compatible substrates) • ALD coatings (advanced oxides, nitrides etc.) • 2D-3D micro structuring • Sensor design • Materials and chemistry (polymers, wear-resistant coatings)

  12. Danish Technological Institute (DTI) Responsible: Centre Manager, Ph.d., Lars Pleth Nielsen Contribution: • Plasma-enhanced Si3N4 or Al2O3 as a potential electric insulator • Wear-resistant PVD/CVD coatings • Ion beam accelerator for metal doping of DLC • Thermocouple based on e.g. copper/constantan • Testing of sensors and coatings

  13. VTT Technical Research Centre of Finland Responsible: Senior Research Scientist, Dr. (Tech.) Helena Ronkainen Contribution: • Sensor design • Wear-resistant coatings: Diamond like carbon coatings • Integration of piezoelectric material (e.g. AlN) with patterned MEMS structures • Integration of electronics • Tribological test of sensor structures

  14. Industrial kick-off meeting Purpose: Inspire the design of the demonstrators to be developed Place: Acreo AB, Electrum 236, Isafjordsgatan 22, SE-164 40 Kista, Stockholm Program: 10.00-10.10 Arrival 10.10-10.20 Welcome and introduction to COSMOS by Lars Pleth Nielsen, DTI 10.20-10.30 Ultra short presentation around the table (1-2 min per head) 10.30-12.00 Technical presentation by the industry on interesting applications for testing the concept of surface embedded sensor 12.00-13.00 Lunch 13.00-14.00 Common COSMOS technical presentation: Acreo, DTI, SINTEF, VTT 14.00-15.00 Discussion on possibilities. Can we define a common object? 15.00-15.15 Short presentation of Acreo 15.15-15.30 Short presentation of SINTEF 15.30-15.45 Short presentation of VTT 15.45-16:00 Short presentation of Danish Technological Institute (DTI) 16.00-dep. Summing up, comments, conclusion