The EX5 Excimer Laser

1. The EX5 Excimer Laser • A total metal ceramic excimer laser with many advantages • Low cost Mini laser • Long gas lifetime • Low cost of operation • Computer controlled • Air cooled • High power in a compact table top package GAM LASER, INC. 2009

2. TYPE II SUPERCHAMBER Performance Highlights • Total Metal/ceramic design • Corona preionization • New chamber material • New direct drive blower • New electrode design • Active optics filtering for longer optics lifetime • Improved optics material • Increased bearing lifetime • Increased gas lifetime • Linear power with repetition rate • Higher repetition rate • 1% pulse to pulse stability • Reduced parts count gas handling system • Solid state thyratron GAM LASER, INC. 2009

3. EX5-F2 157nm PERFORMANCE • Vacuum Ultraviolet at 157nm • Single Fill gas lifetime 10 million pulses • Static gas lifetime 10 Days • Energy 2mJ • Average power .65 W • Stability <2% RMS • KF/16 purge flange included GAM LASER, INC. 2009

4. EX5 Specifications GAM LASER, INC. 2009

5. Dynamic Gas Lifetime GAM LASER, INC. 2009

6. Repetition Rate Performance GAM LASER, INC. 2009

7. Pulse to Pulse Stability GAM LASER, INC. 2009 0.77% rms Stability @ 200Hz, 13.5mJ KrF 248nm

8. EX5 Running Costs • Running costs for 2 billion pulses ArF KrF • Refurbishment after 2 billion pulses $7500 $7500 • Premix gas cylinders $1500 $1200 • Optics exchanges $7000 $1150 • Total costs $16000 $9850 • Cost per Thousand pulses $0.008 $0.0049 • Running cost per hour at 200Hz $5.76 $3.53 • Cost per pulse 0.8e-5 ¢ 0.49e-5 ¢ GAM LASER, INC. 2009

9. GAM LASER, INC. 2009