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Scanning electron microscopy

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  1. Scanning electron microscopy Katedra experimentálnej fyziky FMFI UK B r a t i s l a va

  2. History • 1897- Discovery of the electron ( J. J. Thompson) • 1924 - Particle and wave theory (L. deBroglie) • 1926 - Electromagnetic lens (H. Busch) • 1927 - Demonstration of electron diffraction (C. J. Davisson and L. H. Germer) • 1929 - Theoretical description of SEM (H. Stintzing) • 1932 - Construction of first electron microscope (transmission) (M. Knoll and E. Ruska) • 1935 - Demonstration of scanning electron microscope theory (M. Knoll) • 1938 - First SEM constructed (M. von Ardenne) • 1939 - First commercial transmission electron microscope (B. von Borries and E. Ruska)

  3. History • 1942 - Production of electrostatic lens SEM (V. K. Zworykin, J. Hillier and R. L. Synder) • 1956 - Production of electromagnetic lens SEM (K. C. A. Smith) • 1956 - X-ray microanalyzer with a scanning probe (V. E. Cosslett and P. Duncomb) • 1960 - Improved secondary electron detector (T. E. Everhart and R. F. M. Thornley) • 1960's - First commercial SEM (Cambridge Instrument Co., Ltd.) • 1971 - Construction of a STEM with a field emission source (A. V. Crewe and J. Wall)

  4. Physics • Electron interaction with sample • Electron energy spectrum • Electron – core electron interaction

  5. Electron interaction with sample

  6. Electron energy spectrum

  7. Electron – core electron interaction

  8. Technics • Vacuum chamber • Electron optics • Image formation • Electronics

  9. Tubus VEGA

  10. Electron gun

  11. Cathode

  12. Electromagnetic lens

  13. Detectors

  14. Image formation

  15. Image modes

  16. Image modes

  17. Image modes

  18. SEM – VEGA TS5136MM

  19. Image Gallery • Poppy seed

  20. Image Gallery • Leaf of nettle with beetle

  21. Image Gallery • Fly head

  22. Image Gallery • Ant head

  23. Image Gallery • Ant feeler