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MOTEK INCIDENT TI’s RESPONSE

MOTEK INCIDENT TI’s RESPONSE. Silane Questionnaire. All sites responded, but many needed follow-up since some answers (and questions) were not clear. Developed ESH Compliance Questionnaire Based upon revised gas program requirements. Sent to All TI Sites

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MOTEK INCIDENT TI’s RESPONSE

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  1. MOTEK INCIDENT TI’s RESPONSE

  2. Silane Questionnaire • All sites responded, but many needed follow-up since some answers (and questions) were not clear • Developed ESH Compliance Questionnaire • Based upon revised gas program requirements • Sent to All TI Sites • Requested sites’ feedback on current state of compliance via completion of the questionnaire

  3. Silane Questionnaire ( Cont.) • All non-affirmative answers were ranked via a standardized risk assessment tool • Low risk non-conformances were reviewed for possible elimination as standard requirements (legacy issues) • Moderate to Very High Risk non-conformances require action and some capital approval

  4. Questionnaire Elements • Storage & Distribution • Gas rooms & external areas • Monitoring • Gas leak detection & UV/IR fire detection • Distribution Systems • Gas cabinets & exhausted enclosures • Cylinders • Piping/Tubing • Process Exhaust/Vent Lines • Point-of-Use Abatement • TPUs • Burn Tubes • Vacuum Pumps • Documentation and Procedures • Hazard Assessment • Training

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