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Nan omanufacturing

Nan omanufacturing

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Nan omanufacturing

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  1. Nanomanufacturing Boris N. Chichkov Leibniz University Hannover b.chichkov@lzh.de

  2. near IR fs-pulses resin Laser printing Two-photon polymerization Laser ablation Laser nanomanufacturing technologies

  3. Fs laser microstructuring SEM image of high quality microchip fabricated in 400 µm thick AlN substrate

  4. Laser generation of nanoparticles laser • High purity and stability • Monoatomic materials • Alloy nanoparticles • Particle surface-functionalization • Polymer-embedded nanoparticle • Coatings with nanosized particles • Controlled drug-release • Stoichiometric nanoparticles • Novel methods  better control Nano- particle Liquid target J. Phys. Chem. C, 2010 Appl. Phys. A, 2010

  5. Fabrication of spherical nanoparticles by laser printing Receiver substrate (glass) Thin Au film Donor substrate (glass) Tightly focused fs laser pulse „Laser-induced transfer of metallic nanodroplets for plasmonics and metamaterial application“ JOSA B, Vol. 26, No. 12, B130, 2009 5

  6. 200 nm 50 µm Controlled fabrication and precise deposition of silicon nanoparticles Receiver substrate (glass) Silicon nanoparticle Tightly focused fs laser pulse Silicon dioxide Bulk silicon Silicon donor layer „Laser printing of silicon nanoparticles with resonant optical electric and magnetic responses“, Nature Communications, 5, No. 3402, (2014). 6

  7. near IR fs-pulses resin Nanotechnology with lasers 3D nanostructuring by two-photon polymerization Ormocer Opt. Lett. 28, 301, (2003) Adv. Eng. Mat. 5, 551, (2003) Deutsches Patent 101 52 878.7-43

  8. PhCs fabricated in Zr-hybrid polymers Nature Photonics, v. 3, 450 (2009)

  9. Two-photon polymerization (5cm/s) Commercially available 2PP system from LZH: b.chichkov@lzh.de

  10. Microoptics: Tapered waveguides

  11. Fabrication of SRRs by laser direct-writing • Mechanical properties of the polymer allow fabrication of • free standing SRRs • Excitation of magnetic resonance for radiation • incident perpendicular to substrate surface (kz) FDTD simulation of single SRR response Ring diameter: 5 µm Wire diameter: 800 nm Gap width: 800 nm Resonance: 11 µm wavelength (RLC model)

  12. 3D conductive polymer microstructures • PEG-DA and EDOT blends are used for 2PP and sequential in-situ oxidative polymerization; • Real-3D, physically stable and biocompatible microstructures are produced; • Interpenetrating polymer network of PEG-DA and PEDOT leads to conductivities of up to 0.04 S/cm. EDOT PEDOT PEG-DA : poly(ethylene glycol) diacrylate EDOT : 3,4-ethylenedioxythiophene PEDOT : poly(3,4-ethylenedioxythiophene)

  13. 3D ultralight and ultra strong materials

  14. Surface plasmon-polaritons for data transport Plasmonics Photonics 1 THz 1 GHz Operating speed Electronics 1 MHz The Past 1 kHz 10 nm 100 nm 1 µm 10 µm 100 µm 1 mm Critical dimension R. Zia et al., Materials Today9, 20 (2006) 14

  15. Surface plasmon-polaritons Bandwidth of light: 400 THz – 750 THz Core size: ~ 8 µm Bandwidth of electronics: ~ 10 GHz pitch: ~ 65 nm 15