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Lithography
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Paulo Moreira. Technology. 2. Lithography. Basic sequenceThe surface to be patterned is:spin-coated with photoresistthe photoresist is dehydrated in an oven (photo resist: light-sensitive organic polymer)The photoresist is exposed to ultra violet light:For a positive photoresist exposed areas become soluble and non exposed areas remain hardThe soluble photoresist is chemically removed (development).The patterned photoresist will now serve as an etching mask for the SiO2 .
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Lithography
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