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Sputter coating made easy. Sputter head arm. IMPORTANT! If this is the first time you are going to use the sputter coater , then talk to Nader. Do NOT proceed. Check the height of the plate, where the sample is placed [1]. It should be 35 or 50 mm, there is a plastic scale bar [2]

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Sputter coating made easy

Sputter head arm

  • IMPORTANT! If this is the first time you are going to use the sputter coater, then talk to Nader. Do NOT proceed.
  • Check the height of the plate, where the sample is placed [1]. It should be 35 or 50 mm, there is a plastic scale bar [2]
  • Place samples and close lid.
  • Depend on you choose 35 mm or 50 mm WD, one can read in book [3] how many ampere ,for how long time is necessary to reach the desired coating thickness (15-20 nm is a good choice) from the corresponding curve. Add 10-15 seconds to the necessary coating time, allowing you to adjust the current.
  • Set timer [4]
  • Check that the vacuum is connected [5]. Turn big yellow button on the backside of the instrument to open.
  • The valves position must be set as lower picture “ ON”[ 5].
  • Turn machine on.[6]
  • Turn on vacuum pump on wall, on contact marked “S” [7]

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3

1

2

5

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14

4

OFF

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13

15

Do not touch

  • Wait for the pressure to reach 5*10-2 mbar [8]
  • Open the main valve[9] on argon bottle, open fully valve [11] counterclockwise.
  • Adjust the outlet pressure approximately 1.0 barthe big black knob clockwise[12].
  • Do NOT touch the knob labeled “Argon“ on the instrument.
  • Flush machine 3- 5 times(press button labeled “flush” [13]), the pressure should go back to 5*10-2mbar after each press
  • Press start [14] and adjust the current to the desired value [15].
  • Wait until the timers counts down and show 0.
  • Turn off machine
  • Turn off the pump (on wall contact)
  • Close the main valve[9] on argon bottle, close fully valve [11] clockwise.
  • Close the big black knob counterclockwise[12].
  • Turn the big yellow button on the backside of the instrument
  • REMEMBER YOUR SAMPLES
  • Close the sputter head arm.

ON

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By Nader Payami, Christian Schack Pedersen and Sorin Nedel, January 2012

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