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矽的純化

矽的純化. 純矽製造流程. Wafer manufacturing/ www.ee.kyu.edu.tw/eeworker/pro2/doc/05Wafermanufacturing.pdf. 2. 矽. http://tea513.myweb.hinet.net/65.htm. 矽晶圓 ( 片 ) 的材料是 " 矽 " ，地殼表面富含砂石 ( 主要成分二氧化矽 ) ，當從砂石內萃取出所需的矽元素後，經還原等處理，可萃得約 98% 野晶體 ( 粗晶體 ) ，再經純化過程，可得純化 多晶矽 ，其形狀為粒狀或棒狀，純度高達 0.99999999999 。. 3. 純矽提煉.

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矽的純化

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  1. 矽的純化

  2. 純矽製造流程 • Wafer manufacturing/www.ee.kyu.edu.tw/eeworker/pro2/doc/05Wafermanufacturing.pdf 2

  3. 矽 • http://tea513.myweb.hinet.net/65.htm 矽晶圓(片)的材料是"矽"，地殼表面富含砂石(主要成分二氧化矽)，當從砂石內萃取出所需的矽元素後，經還原等處理，可萃得約98%野晶體(粗晶體)，再經純化過程，可得純化多晶矽，其形狀為粒狀或棒狀，純度高達0.99999999999。 3

  4. 純矽提煉 • Wafer manufacturing/www.ee.kyu.edu.tw/eeworker/pro2/doc/05Wafermanufacturing.pdf 4

  5. Wafer manufacturing/www.ee.kyu.edu.tw/eeworker/pro2/doc/05Wafermanufacturing.pdf 5

  6. 矽砂Silica Sand 6 • http://www.ene.isu.edu.tw/upload/52/37/files/dept_37_lv_3_7387.pdf

  7. Silica(矽石) 矽石或稱為SiO2是最簡單的矽酸鹽材料 7 • http://www.ene.isu.edu.tw/upload/52/37/files/dept_37_lv_3_7387.pdf

  8. mineral collection Lepidolite from Jensan Set. Composition:K(Li,Al)3(Si,Al)4O10(F,OH)2 Composition:Be3Al2Si6O18 （http://theodoregray.com/PeriodicTable/Elements/014/#sample9） 8

  9. mineral collection Composition:SiO2 Composition: (Ni,Mg)3Si2O5(OH)4 （http://theodoregray.com/PeriodicTable/Elements/014/#sample9） 9

  10. mineral collection Composition:Be3Al2Si6O18 Silicon Carbide crystal. （http://theodoregray.com/PeriodicTable/Elements/014/#sample9） 10

  11. Chunk of 99.9999% crystal. Less pure four pound lump. （http://theodoregray.com/PeriodicTable/Elements/014/#sample9） 11

  12. 矽的純化 I 氯化氫 反應器, 300 C Si + HCl  TCS 矽粉末 冷凝器 過濾器 99.9999999%純度的三氯矽烷 純化器 12 • jade.ee.hit.edu.tw/eclass/SemiDevice/SMT_C/中文Xiaoch04.ppt

  13. 矽的純化 II 製程反應室 電子級矽材料 H2 氫和三氯矽烷 液態三氯矽烷 TCS+H2EGS+HCl 載送氣體的氣泡 13 • jade.ee.hit.edu.tw/eclass/SemiDevice/SMT_C/中文Xiaoch04.ppt

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