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Micropumps/Microvavles

Micropumps/Microvavles. Outline. Different types of micropumps Mechanic pump Membrane pump Diffuser pump Non-Mechanic pump Bubble pump Electrohydrodynamic (EHD) pump. Mechanical Pump.

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Micropumps/Microvavles

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  1. Micropumps/Microvavles

  2. Outline • Different types of micropumps • Mechanic pump • Membrane pump • Diffuser pump • Non-Mechanic pump • Bubble pump • Electrohydrodynamic (EHD) pump

  3. Mechanical Pump • In general, mechanical pump consists of moveable components, such as moveable valves, moveable membrane, moveable channel, etc. • Mechanical pump can be categorized into: • Membrane pump • Rotary pump • Micro gear pump • Diffuser pump

  4. Pump chamber

  5. Valves

  6. Check valve-example

  7. Fixed geometry valve pump

  8. Membrane Pump • Membrane Pump often consists of two check valves and a chamber with moveable membrane. • By some mechanisms, membrane can be actuated to change the volume of chamber. • Because the check valve can be opened only in one direction, for each circle, some fluid will be moved from inlet to outlet.

  9. Electrostatic Membrane Pump • Goodness: • Low power, good control of actuation and short response time. • Weakness: • High actuation voltage, small stroke. R. Zengerle et. al., MEMS’95

  10. Pieozelectric Membrane Pump • Goodness: • Large actuation force, and short response time. • Weakness: • Low working frequency, small stroke. V. Lintel et al., Sensors and Actuators A, 1988, 15:p. 153-167

  11. Thermopneumatic Membrane Pump • Goodness: • Large actuation force, low operating voltage. • Weakness: • Low driving frequency Lammerink, 1993; Lammerink, 1996

  12. Shape Memory Alloy Driven Membrane Pump Suction State Pumping State • Goodness: Large pumping rate, high working pressure. • Weakness: Low driving frequency, low energy efficiency W.L., Benard, et. al., “A Titanium-Nickel Shape-Memory Alloy Actuated Micropump”, Proceedings of Transducers’97, vol. 1, pp.361-364

  13. Centrifugal pump- rotary pump • Magnetically driven • Magnetic stator and central pin are permalloy • Rotors were separately made and assembled into pump by hand (50 microns tall, 500 microns diameter). • Problems are the complex fabrication process and reliability. C.H. Ahn and M.G. Allen, “Fluid Micropumps Based on Rotary Magnetic Actuators”, MEMS’s 95, 1995, pp. 408-412

  14. Micro gear pump

  15. inlet outlet outlet inlet Q2 Q1 Q1 Q2 Volume decreasing Volume increasing Diffuser action Nozzle action Diffuser action Nozzle action Supplying Mode: |Q1|>|Q2| Pumping Mode: |Q1|<|Q2| Diffuser Pump • Difference between diffuser pump and membrane pump is that diffuser pump has no check valves. Instead, two diffusers are introduced. • Diffuser is a channel with a increasing cross –sectional area. When fluid flows in one way or the other, it will encounter different flow resistances caused by the diffuser.

  16. Diffuser Pump • Except the difference between diffusers and valves, diffuser pump is similar with membrane pump. • Many mechanisms can be used to drive a diffuser pump. • Goodness: simple fabrication, free of valve fatigue. • Weakness: sensitive to bubbles, low operating pressure Stemme et al., 1993,

  17. Non-Mechanical Pump • Without movable parts, non-mechanical pump is often much simpler than mechanical pump. • Non-mechanical pump includes: • Electric field mediated pump • Bubble pump • Other pumps

  18. Electric field mediated pump

  19. Electric-osmotic pump

  20. Electric-osmotic pump-example

  21. Static EHD pump

  22. EHD pump-example

  23. EHD Pump

  24. EHD Pump • EHD pump uses applied electric field to induce and drag charges in fluid. • Goodness: no moving parts, very simple fabrication process • Weakness: unsuitable for conductive fluid

  25. EHD PUMP-example

  26. flow + - + - + - positive ion + - + - + - flow A Planar EHD Pump Si-Hong Ahn, Yong-Kweon Kim, “Fabrication and experiment of a planar micro ion drag pump,” Sensors and Actuators A70 (1998) 1-5

  27. Design of EHD Pump • Build the electrodes and channel on the same wafer. • Electrodes go across the sidewall, resulting in a higher efficiency.

  28. Two Successive Pumping Photos Fluid Fluid

  29. Simplest Pump: Bubble Pump • Goodness: simple • Weakness: low flow rate, and fluid will be overheated near the heater. T.K. Jun and C.-K. kim, J. Appl. Phys., Vol. 83, No. 11, 1998

  30. Bubble Pump T.K. Jun and C.-K. kim, J. Appl. Phys., Vol. 83, No. 11, 1998

  31. Magnetic Pump

  32. Magnetic Pump-example

  33. Ultrasonic pump

  34. Acoustic pump-example

  35. Pump by interfacial tension

  36. Interfacial tension pump- Example

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