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Introduction

Vacuum Technology. Introduction. Pumps Valves Gauges Seals. UHV Pumps. Capture pumps are the dominating pumps for vacuum systems for synchrotron light sources Titanium is the most common getter sputter-ion pumps use chemical and ionization pumping effects. Sputter Ion Pumps.

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Introduction

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  1. Vacuum Technology Introduction Pumps Valves Gauges Seals

  2. UHV Pumps • Capture pumps are the dominating pumps for vacuum systems for synchrotron light sources • Titanium is the most common getter • sputter-ion pumps use chemical and ionization pumping effects

  3. Sputter Ion Pumps Sputter Ion Pumps

  4. Sputter Ion Pumps • At SLS storage ring we use standard diode pumps with Varian Dual controllers • Typically 8 pumps share the same pump controller • All pump controllers run in STEP VOLTAGE mode

  5. electron channel NEG Strips NEG Pumps NEG Strips • APS 5 mm Undulator chamber • ST 707 NEG strips • 350-450°C activation temperature • High pumping speed and pumping capacity for noble gases Courtesy of E. Trakhtenberg NEG Cartridges • Getter material Zr-V-Fe and Ti – V • Very compact with high pumping speed and capacity • Flange size DN 40, 100, 150 CF Courtesy SAES Getters

  6. Titanium Sublimation Pumps Ti-filament periodically heated with high currents. Ti evaporates and generates a getter film on the chamber wall or cooled screen. Progressive saturation and reduction of pumping speed with time. Ti-Filament Chamber wall

  7. Valves • All metal valves are used for vacuum systems of synchrotron light sources • RF shielded sector gate valves • All metal angle valves for the connection of roughing pumps • All metal gate valves for beamline frontends

  8. Valves SLS Sector Vacuum Scheme

  9. Vacuum Gauges • Total pressure gauges for synchrotron light sources • Total pressure measurement • Sensor for vacuum interlock • Cold cathode gauges (IMG) are mainly used for total pressure measurement • At SLS we use active gauges with on board electronics • Pirani gauges • RGA

  10. UHV flanges All Metal Flanges Connections Flat Seal-Flange (ASP, CLS, SLS) Temperature control is required CF-Flange with RF-Bridge (BESSY II) CF-Flange with Small gap (ESRF, ANKA)

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