1 / 6

The PGL Nanoruler Scans a Small Beam of Fringes Across a Large Substrate.

The PGL Nanoruler Scans a Small Beam of Fringes Across a Large Substrate. SBIL – Scanning-Beam Interference Lithography VPSBIL – Variable Period SBIL. 910mm x 420mm Grating Substrate loaded onto the Nanoruler. Current maximum size is about 96 cm x 60 cm. Improvement in Gold Gratings.

margie
Download Presentation

The PGL Nanoruler Scans a Small Beam of Fringes Across a Large Substrate.

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. The PGL Nanoruler Scans a Small Beam of Fringes Across a Large Substrate. SBIL – Scanning-Beam Interference Lithography VPSBIL – Variable Period SBIL

  2. 910mm x 420mm Grating Substrate loaded onto the Nanoruler Current maximum size is about 96 cm x 60 cm

  3. Improvement in Gold Gratings

  4. Hybrid Gratings (Metal with dielectric over-layers) have been produced in small samples. Duty cycle versus Grating Depth (Height) Hafnium Oxide/SiO2/Gold Hybrid grating provide challenges in fabrication but may provide a higher laser damage threshold. A SEM of a hybrid grating (Hafnia/Silica/Gold)

  5. MLD Grating Improvements LFEX – Osaka 2 beamlines are populated with gratings → Goal for MLDs is to produce grating structures which are tall and thin to minimize e-field exposure for high LDT Photoresist Etched

  6. 1.5 to 2 meters gratings – Current technologies are scalable 2 – meter Bar mirror Wavefront improvements rely mostly on improving metrology before and after measurements, thermal control (use fused silica!), and mounting inprovements during imprinting. Simple Light-weighted Substrate Imprinting accuracy is high (< 10nm) – at right is a 280 nm period resist grating written in between an oxide grating to produce a 140 nm grating!

More Related