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University of California - Irvine. Micromachined Optical Accelerometers for Serial Sensor Networks. Max Perez MicroSystems Lab Mechanical and Aerospace Engineering University of California, Irvine Irvine, CA perezma@uci.edu http://mems.eng.uci.edu. Micro-Opto-Electro-Mechanical Systems

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Presentation Transcript
slide1

University of California - Irvine

Micromachined Optical Accelerometers

for Serial Sensor Networks

Max Perez

MicroSystems Lab

Mechanical and Aerospace Engineering

University of California, Irvine

Irvine, CA

perezma@uci.edu

http://mems.eng.uci.edu

IM-SURE

Irvine, CA 6.29.05

slide2

Micro-Opto-Electro-Mechanical Systems

(MOEMS)

Manipulating the world at the level of the wavelength

For Optical Communications

For Consumer Electronics

IM-SURE

Irvine, CA 6.29.05

Motivation

project goals

Proposed System

    • All Optical
    • Single source/signal line
    • Immune to EM interference
    • High Sensitivity

Power

DAQ

Light

OSA

Project Goals

A Distributed Acceleration Sensor network

  • Conventional Systems
    • Electrical
    • Multiple power /detection lines
    • Subject to EM interference
    • Low Sensitivity

Monitor

IM-SURE

Irvine, CA 6.29.05

Motivation

slide4

Applications

  • A system of arrayed inertial sensors that are:
  • Simple
  • Robust
  • Highly Sensitive
  • Spatially Distributable
  • Could be used for:
  • Structure System Identification
  • Vibration Monitoring
  • Structural Health Monitoring

IM-SURE

Irvine, CA 6.29.05

Motivation

slide5

IN

OUT

FPI-based Accelerometer Concepts

  • FPI-Based Accelerometer
  • Proof mass (m) suspended (stiffness k) relative to reference plate (damping c)
  • Reference plate attached to measured structure
  • System Operation
  • Interferometric fringe peak placement indicates inertial load (acceleration)

Broadband Light

A

Signal

I

I

IM-SURE

Irvine, CA 6.29.05

Background

slide6

Device Fabrication

IM-SURE

Irvine, CA 6.29.05

Fabrication

slide7

PDMS Elastomeric Suspension

  • Elastomeric Suspension:
    • Low Stress
      • Minimize plate bowing
    • No surface deposited mechanical layers
      • Minimize surface roughness
  • PDMS Elastomer:
    • High Compliance (E ~ 1MPa)
    • Stable (Tg ~ -125C)
    • Cleanroom compatible
    • Tough

Unstreched / Stretched PDMS Elastomer

IM-SURE

Irvine, CA 6.29.05

Fabrication

slide8

Sense

Reference

a

a

The Trunnion Mode

=> Dynamic parallel plate error

Most Pressing Concern

  • Sense Mode
    • Normal or ‘out-of-plane’ mode
      • Desire low stiffness for sensitivity
  • Trunnion Mode
    • Out-of-plane tosional mode
    • Activated by:
      • Asymmetric suspensions (sense mode coupled)
      • Rotational Acceleration

I

Sense

Reference

IM-SURE

Irvine, CA 6.29.05

Background

slide9

~

Composite Fabrication

  • FAiMTa:
    • Field-Aided Micro-Tailoring technology
    • Electrically aligned particles in a polymer matrix act as short fibers
      • Developed by Geun Hyung Kim and Yuri M. Shkel (U. Wisconsin-Madison)
        • Polymeric composites tailored by electric fields
        • Journal of Materials Research
        • Vol. 19, #4, No. 4, Apr 2004

IM-SURE

Irvine, CA 6.29.05

Fabrication

slide10

~

Composite Results

500-900V @5Hz

=> 8000X increase in trunnion stiffness 

  • Alignment:
    • Simple application of voltage results in particle alignment with structure geometry
      • Iron fillings
      • 500-900V, ~0.5mm gap, 5Hz
      • 10% Fe : PDMS

=> 2X increase in sense stiffness 

IM-SURE

Irvine, CA 6.29.05

Results

slide11

IN

OUT

R

Serialization Concepts

  • Serialized Operation:
    • Define sensor channels of R-high for each FPI
    • Creates an Intrinsic Wavelength Division sensor Network

Signals

I

I

A

B

R

Sensed Vibrations

IM-SURE

Irvine, CA 6.29.05

Background

slide12

Funding/Acknowledgments

  • The National Science Foundation Grant CMS-0223050, program manager Dr. Shih-Chi Liu.
    • Duration: Three years (Currently at 2/3 completion)

IM-SURE

Irvine, CA 6.29.05

slide13

Questions?

IM-SURE

Irvine, CA 6.29.05

slide14

1.0 mm

0.25 mm

0.5 mm

The Composite Shear Suspension

  • Characteristics
    • Low volume fractions
      • =>greatest effects!
    • Minimal effect on sense axis stiffness

IM-SURE

Irvine, CA 6.29.05

Background