Real-Time Grazing Incidence Small-Angle X-ray Scattering

1. Time-Resolved X-ray Studies of Low-Energy Ion Bombardment and Plasma ProcessingKarl Ludwig, Boston UniversityDMR-0507351 Real-Time Grazing Incidence Small-Angle X-ray Scattering Atomic Force Microscopy We are using intense x-rays from the National Synchrotron Light Source (NSLS) to examine how atoms on the surface of materials move during ion bombardment and plasma processing. These are important processes in the development of semiconductor devices. X-ray scattering allows us to examine nanoscale structures on the surface as they spontaneously form. We use this information to understand the fundamental mechanisms driving this phenomenon and how they might be useful. The figures at right exhibit results of 1000 eV Ar+ ion bombardment of Silicon. The right sides show the real-time evolution of the grazing-incidence small-angle x-ray scattering profiles at 110 sec intervals. For the top and bottom cases, peaks grow because correlated structures develop spontaneously on the surface. These can be seen in the atomic force micrographs on the left. Room Temperature – with “seeding” Room Temperature – without “seeding” 750 C – without “seeding”

2. Time-Resolved X-ray Studies of Low-Energy Ion Bombardment and Plasma ProcessingKarl Ludwig, Boston UniversityDMR-0507351 Education and Outreach: Two graduate students (Gözde Ozaydin and Yiyi Wang) and a Boston University undergraduate (Safa Alzaim) have been contributing to the project. During Summer 2006, we also introduced a student in the Boston University High School Honors Summer Research Internship Program, Ong Momo, to materials research. He learned to measure the resistivity and magnetic properties of thin films deposited in our laboratory. This was Momo’s first exposure to materials research – he plans to go on to major in physics in college. Above: High school student Ong Momo (left) with graduate student Gözde Ozaydin and his poster describing the work that he did in our laboratory. Momo, a participant in the Boston University High School Honors Program, set up a system to measure the resistivity and magnetic properties of thin films deposited in our laboratory..