m = 5. j = 8. y. y 6. y 5. y 7. y 4. y 1. y 0. y 8. y 2. y 3. t. Research program
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m = 5
j = 8
We apply the systems engineering approach to materials synthesis and macromolecular structure. Mathematical models are not accurate enough for a purely model-based design. Instead, we combine mechanistic modeling together with statistics and experimentation. In the group we develop general methodology and algorithms, and then apply the techniques in a number of specific applications.
Research Results on Chemical Vapor Deposition of Metal Oxide Thin Films
R. Xiong and M. A. Grover, “In situ estimation of thin film growth rate, complex refractive index, and roughness during chemical vapor deposition using a modified moving horizon estimator,” Journal of Applied Physics, 103(12) 124901 (2008).
P. J. Wissmann and M. A. Grover, “A new approach to batch process optimization using experimental design,” AIChE Journal, 55(2), 342-353 (2009).
National Science Foundation CAREER award “A Systems Approach to Materials Processing
Experimental Design for Process Optimization
In Situ Optical Sensing and Robust Estimation
Interpreting optical sensor data is a major hurdle to real-time control of thin films.