Understanding Polysilicon Depletion in Semiconductor Devices

1. CHAPTER 5-2 5.10 ~ 5.15

2. 5.10 Polysilicon Depletion

3. 5.10 Polysilicon Depletion 5.10.1 5.10.2 5.10.3 5.10.4

4. 5.10 Polysilicon Depletion 5.10.5 5.10.6 5.10.7 5.10.8 5.10.9 5.10.10 5.10.11

5. 5.10 Polysilicon Depletion 5.10.12 5.10.13 5.10.14

6. 5.10 Polysilicon Depletion

7. 5.11 Quantum Mechanical Effects

8. 5.11 Quantum Mechanical Effects 5.11.1 5.11.2 5.11.3 5.11.4

9. Quantum Mechanical Effects

10. 5.12 DC Gate Current

11. 5.12 DC Gate Current

12. 5.12 DC Gate Current 5.12.1 5.12.2 5.12.3 5.12.4 5.12.5

13. 5.12 DC Gate Current

14. 5.12 DC Gate Current

15. 5.12 DC Gate Current

16. 5.13 Junction Leakage; Band-to-Band Tunneling; GIDL

17. 5.13 Junction Leakage; Band-to-Band Tunneling; GIDL 5.13.1

18. 5.13 Junction Leakage; Band-to-Band Tunneling; GIDL 5.13.2 5.13.3 5.13.4 5.13.5 5.13.6 5.13.7 5.13.8

19. 5.14 Leakage Currents - Particular Cases

20. 5.14 Leakage Currents - Particular Cases

21. 5.14 Leakage Currents - Particular Cases

22. 5.15 The Quest for Ever-Smaller Devices

23. 5.15 The Quest for Ever-Smaller Devices 5.15.1

24. 5.15 The Quest for Ever-Smaller Devices

25. 5.15 The Quest for Ever-Smaller Devices

26. 5.15 The Quest for Ever-Smaller Devices

27. 5.15 The Quest for Ever-Smaller Devices