Introduction to MEMSPro. EE485A Lab Exercise. MEMS Pro. Suite of modeling tools for designing MEMS structure User enters masks and process flow Software generates 3D model that can be used for finite element analysis Can couple in “Technology Files” provided by different MEMS foundries.
EE485A Lab Exercise
“Poly0”, “Anchor1”, … “Metal” refer to mask layers in the PolyMUMPS process
“HoleX” are pseudo layers that make it easier to create release holes in the structures. More on this later, ignore them for now.
Select the “Drawing Box” tool in the upper left corner
Draw a square on the grid.
Select “Edit Object” from the “Edit” menu
Set the dimensions as given on the right and hit “OK”.
Zoom out using View -> zoom -> zoom to selections.
Hit the ‘+’ and ‘-’ keys to see how to zoom in and out without going to the menus.
Save your file to the desktop with the name “XYZ_MEMSProIntro.tdb” where “XYZ” are your initials.Creating the bottom electrode