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    1. ??:?????????? ??:???? ??:49612081 ??:??? ??: 1.?? 2.2008???????? 3.????1:???? 4.????2:?????? 5.????

    2. ??: ??????2008????6082.1??(??3.2% ) ?????—1.??????????925.9??(?2007???3.1%) 2.?????????17.8% 3.????????10% 4. ??????1.2% 5.??.??.?????.?????(??20%) 6.??????????? ???????????????????1300988???,?2007???19.2%

    3. 2008??????? a.??????????????,???2008??????????70% b.??????????????? c. ??????????????????????? d.??????????????????,????? e.???SRB????2009-2013??????29.5???????? f.?????????????,????.??.??? g.?????????19%,???????????? h.???????????????20??? i.2009??????,??????????????????30-50%

    4. ????1:???? ??:1.??????????,?????????????,?? ????????????????. 2.???????????????,?????????? ?????????????. 3.????????????,?????????????; ???????????????,????????????. 4.2008?????????????,??????????? ???????2007?????26.1? ,???????? ??,??2008????3?. 5.???????????????????????,??? ???2007?????29.8?;2008??????3?.

    5. ??: 1.2008???????????-???????????????? ???????????????????????2008????, ?????????????????,?2009??????? ???. 2.2008???????????????5219??,?2007?? ???3.2?,???????????;??????????. 3.???????2008?????????,?????27.3? ,??????,?15.9?;??????,?6?. 4.?????????????,?????,??;?????? ?.

    6. ??:1.????????,2008??????????5805??,?? ?????????????????,???1596??,?? ???27.5?,????????3C?????. 2.??????????,??????,??????????? ??????????????????????,??????. 3.???????,2008??????????????,???? ??,???2504??,??????43.1?,??????;?? ????????,??,??,???,??,??,??.

    7. ????2:?????? a.??????????????,???2008??????????70%: 1.?????????,??????:(1)???????????????,??????????????????????

    8. ??????? ??????: ICP,????????? ???????,???? ???????????? ????????SF6 ? C4F8?N2?O2?Ar ??, ??????????? ??????????? ????????.

    9. ?????????MEMS??????: 1.???????????Si3N4?SiO2 ???,?????????

    10. 2.??????????,??????????????????? ,??????????,??????,??????????? ???????,????????????????,?????? ???,?????????????????????????,? ???????,???????????????,??????? ????

    11. 3.??????,??????????????,???????? ????????????????????(KOH),??????? 70?C,??????????24UM???,??????525UM, ????????510UM,???????21????,?????? ??????,?????????,?????????????? ????

    12. 4.?????????,???????(?????)??????,? ???????????(Inductive Coupling Plasma Etching,ICP) ??????????,???????????10UM,?????? ??ICP?10UM????????????????????????? ???????????????,??????????????? ???????????

    13. 5.?????????,????????,???????,??? ????(????)??????,??????????? ?????????,???????????

    14. 6.??,??????????????????,???????? ??????????????

    15. ?????????

    16. ????? Cathode

    17. ????????

    18. ????????shutter????

    19. ?????????

    20. COF???????????

    21. ??????????

    22. ???????

    23. 2.???????????????????????: (1)??ULVAC?AKT?????????? (2)??PEVCD???????????????? (3)???????????? (4)??????? 3.??????: (1)????????????? (2)???????? 4????: (1)?????????? (2)?????? (3)?????????,???????,?????? 5????????????: (1)???????????????,?????? (2)?????????LCD????????????????? (3)??????????????????? (4)TFT-LCD????????????

    24. ULVAC ??????????????????????????,?1981????????????? ???(ULVAC TAIWAN Co.,Ltd),??????????????????,???????? ?,??????????????????????????????2002?1??????? ??????????(ULVAC TAIWAN INC.)??????????????,??????? ???????????????????????2005?12??????????????????????????????????,????????????

    25. AKT AKT???1993????????????,?????????????(TFT-LCD)????????,????????????????????????????     ??????????(TFT-LCD)?????????????(FPD),?????????????????????????????, ?????????,?????????????????????(LCD)?????????????(??300??)??,???????60??     ??????(Applied Materials, Inc.)??????????????????????TFT-LCD ????????????????????, ???1990?????TFT-LCD?????????????????(CVD)????????,?????????CVD?????????????(???????????Endura?Centura????)?          

    26. PEVCD Plasma-enhanced chemical vapor deposition (PECVD) is a process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creation of a plasma of the reacting gases. The plasma is generally created by RF (AC) frequency or DC discharge between two electrodes, the space between which is filled with the reacting gases.

    27. ??? ?????????????,????????????????????????????????,???????????????(??????????????????)?????????????????????(??????????????????????????"?"?????,???????????????"??"?????) ??????????????????????(??????????),??,??,??,?????,??????,????????????????????????????????!

    28. ???

    29. b.???????????????: 1.?????????????? 2.???????????????????,??????? 3.?????????????????????????? 4.???????,????????: (1)???????????????? (2)???????????????????????????? ?? (3)??????????,??????? 5.???????????,???????? 6.????????????????????? 7.?????????,????????????

    30. ??????? 2009?1?1????????????,???????“????”???????????? ?????????????????????????????,????????????? ,????????????????????????????????????????,? ??????????????,???????????????????????????? ??? ????????????? ???????????,????????????? ???????????????????????????????????,??????? ???????????????????????,???????????,??????? ??????????????;???????????????????????????? ????????????1994????????????,???????????????? ???“???”??,???????????????????????????,???? ???????????????????,????????????????????,?? ??????????????????,??????????????????,?????? ???????????????,?????????????

    31. c.???????????????????????: 1.???????????????????????,???????? ???????,?????????,????????????? ?? 2.????????????,????7500??? 3.????????????,??????????????????,???????????,?????3c???? 4.???????????,???????????,??????? ???????????? 5.??????????,????50??,??LED????????????? 6.??????????????,??????????????? ?CAD,CAM??????,?????????

    32. ?????

    33. d.??????????????????,?????: 1.???????,??????,???????????,??? ???,??? 2.??????????,?????????????????,? ??? 3.?????????,?????????????5?10?,??? ????? 4.?????????,??????????????? 5.????????????????,????????????? ?,?????????????? 6.???????GDP2.5?,??????3.39?,??3.23?,???? ???????????,????????????20???,?? ???????????????????,???????

    34. e.???SRB????2009??2013?5????29.5??? ?????: 1.????????????????????????????? (SRB),?????????????,????????(ICT),???????????,????????????,?????????????,????????,????????,?????????? 2.????2009?2013?5????29.5??,?????????12? ?,?????8??,????9.5??,????5????,??300 ????????.??????????????,???????? ???????????,????????

    35. f.?????????????,???????????? ?: 1.???????2010?????????????,???????? ?,????????? 2.??????????????????LCD????????6.5?~14 ???????????????????????????????????????????????????????????? ????????????? 3.?????????????????????????????.?????????????????????????????? ???8??????????8?9??????????????? ????????????????????

    36. g.???????????19.2?: 2008???????????1300988???,?2007????19.2?,???? ?????5667.3?????????7342.5???(????).??20 08 ????952567?;???1249891????,??4.1?;??874835 ????,??1.9?;??60214????,??17.1? ???

    37. h.????????????????: 1.2008???????????90740????,?????????2.2?????.????6?20??????????? 2.???????11????????4605????,??16?,????????4737???,????477???. 3.???????????,??????????????????? ?????,?????NC????????????????????????????,2008?180???265?????????? ?????60???????????;????????????? ???? 4.??????????????????,???????????, ???????????????,????????????????,????2009?????????,???????????? ?????

    38. i.2008????????????????20???: 1.??????????????,2008????????????????????????????????20??? 2.????????????????????????,????????,?????????????????? 3.??????????????????????????????????????.????????????????????,???????????? 4.2007?,?????????24115????,????19????,?????6???,?????

    39. ????: 1.????????????,?????????????????; ???????50???????????,??????????? ????????,???????????.??2009????,?? ???????50?,??????????????????????? ,??????,???????? 2. 2009?????????????,?????????;??Infineon ?T1 ?Freescale ?Sony ?STM ????????65????45?? ?????,?????????????,????????,?????? ????????????,???????????????? 3.????????????????????????????.??2009 ?????????????15?,????????????10?,??? ??????????????

    40. ????: 1.?????????????:????????-(????:???,???:???) 2,??????????????-(???) 3.????????????-(????:???,???:???) 4.???????-(?????) 5.TFT-LCD????????????-(?????) 6.?????????-(???)

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